Devices for deflecting a laser beam in a two-dimensional manner
US10901203B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 11, 2018 |
| Grant date | Jan 26, 2021 |
| Priority date | — |
| Expiry date | Jun 20, 2039 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2203/058
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
This disclosure relates to devices for two-dimensional deflection of a laser beam, which include a substrate having a substrate opening, a spring membrane provided on the substrate having spring arms extending over the substrate opening, and a middle section arranged in the substrate opening and supported by the spring arms. The middle section is mounted so it is two-dimensionally tiltable and is axially displaceable in both directions of the spring membrane middle axis. The device includes a mirror fastened on the middle section of the spring membrane and a magnetic or electrostatic drive for tilting the mirror against the restoring force of the spring arms. One or more of a component coupled to the mirror and an end stop unit are configured to limit axial deflection of the middle section to a distance that is within a range of axial deflection of the middle section during the drive-related tilting of the mirror.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.