Bulk acoustic wave resonator
US10903814B2 · kind B2 · utility
1Cited by
2References
8Claims
0Family size
Assignee
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Key dates
| Filing date | Oct 20, 2017 |
| Grant date | Jan 26, 2021 |
| Priority date | — |
| Expiry date | Sep 3, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/54
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A bulk acoustic wave resonator includes a membrane layer, together with a substrate, forming a cavity, a lower electrode disposed on the membrane layer, a piezoelectric layer disposed on a flat surface of the lower electrode and an upper electrode covering a portion of the piezoelectric layer. An overall region at a side of the piezoelectric layer is exposed to the air. The side of the piezoelectric layer has a gradient of 65° to 90° with respect to a top surface of the lower electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.