Patent · US Active

Semiconductor memory devices

US10910378B2 · kind B2 · utility

4Cited by
6References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 6, 2019
Grant dateFeb 2, 2021
Priority date
Expiry dateMar 12, 2039

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D1/692
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

Semiconductor memory devices may include first and second stacks on a substrate and first and second interconnection lines on the first and second stacks. Each of the first and second stacks may include semiconductor patterns vertically stacked on the substrate, conductive lines connected to the semiconductor patterns, respectively, and a gate electrode that is adjacent to the semiconductor patterns and extends in a vertical direction. The first stack may include a first conductive line and a first gate electrode, and the second stack may include a second conductive line and a second gate electrode. Lower surfaces of the first and second conductive lines may be coplanar. The first interconnection line may be electrically connected to at least one of the first and second conductive lines. The second interconnection line may be electrically connected to at least one of the first and second gate electrodes.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.