Solidly mounted transversely excited film bulk acoustic resonator using rotated Z-cut lithium niobate
US10911017B2 · kind B2 · utility
102Cited by
14References
20Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 28, 2020 |
| Grant date | Feb 2, 2021 |
| Priority date | — |
| Expiry date | Jul 28, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/54
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
Acoustic resonator devices, filters, and methods are disclosed. An acoustic resonator includes a substrate and a lithium niobate (LN) plate having front and back surfaces. An acoustic Bragg reflector is sandwiched between the surface of the substrate and the back surface of the lithium niobite plate. An interdigital transducer (IDT) is formed on the front surface of the LN plate. The Euler angles of the lithium niobate plate are [0°, β, 90° ], where β is greater than or equal to −15° and less than 0°.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.