Transversely-excited film bulk acoustic resonator with lateral etch stop
US10911021B2 · kind B2 · utility
103Cited by
14References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 26, 2020 |
| Grant date | Feb 2, 2021 |
| Priority date | — |
| Expiry date | Jun 26, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2003/021
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
Acoustic resonator devices and methods are disclosed. An acoustic resonator device includes a substrate having a front surface and a cavity, a perimeter of the cavity defined by a lateral etch-stop comprising etch-stop material. A back surface of a single-crystal piezoelectric plate is attached to the front surface of the substrate except for a portion of the piezoelectric plate that forms a diaphragm that spans the cavity. An interdigital transducer (IDT) is formed on the front surface of the single-crystal piezoelectric plate such that interleaved fingers of the IDT are disposed on the diaphragm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.