High dynamic range gyroscope

US10914585B1 · kind B1 · utility

Assignee

• HRL Laboratories, LLC · US

Inventors

• Logan D. Sorenson · Thousand Oaks, US
• Raviv Perahia · Los Angeles, US
• David T. Chang · Calabasas, US
• Randall L. Kubena · Agoura, US
• Deborah J. Kirby · Calabasas, US
• Hung Nguyen · Los Angeles, US
• Richard J. Joyce · Thousand Oaks, US

Key dates

• Filing date: May 11, 2020
• Grant date: Feb 9, 2021
• Expiry date: May 11, 2040

Classification

• Technology area (CPC H): Electricity
• CPC primary: H03L7/26
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A sensor includes an acceleration or magnetic field sensitive microelectromechanical systems (MEMS) resonator, configured to oscillate in at least a first normal mode and a second normal mode. The sensor further includes: a coarse readout circuit configured to drive the first normal mode, measure a motion of the first normal mode, and derive from the measured motion a coarse measurement of the true acceleration or true external magnetic field; and a fine readout circuit configured to drive the second normal mode, measure a motion of the second normal mode, and derive from the measured motion and the coarse measurement a measurement of the difference between the true acceleration or true external magnetic field and the coarse measurement.