ESD protection device for a MEMS element

US10916536B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Robert Wolf · Dresden, DE
• Andreas Finn · Dresden, DE
• Daniel Maier · Stuttgart, DE

Key dates

• Filing date: Aug 23, 2019
• Grant date: Feb 9, 2021
• Expiry date: Aug 23, 2039

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10D89/60

Abstract

An ESD protective device for a MEMS element is described as having at least one first line; at least one n-region connected to the first line; at least one insulating region connected to the n-region; at least one p-region connected to the insulating region; at least one second line connected to the p-region; the n-region, the insulating region, and the p-region being situated on a substrate.