Silica glass member, process for producing the same, and process for bonding ceramic and silica glass
US10916687B2 · kind B2 · utility
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Key dates
| Filing date | Sep 6, 2018 |
| Grant date | Feb 9, 2021 |
| Priority date | — |
| Expiry date | Nov 29, 2038 |
Classification
- Technology area (CPC —)General
Abstract
The present invention relates to a silica glass member including: a main body including a silica glass and having a bonding part for bonding to another member; and a bonding film which is provided on the bonding part, has a thickness of 0.2 μm to 10 μm, and includes Au and a glass formed through melting of glass frit, in which the bonding film is produced from Au powder having an average particle diameter of 3 μm or less and glass frit having a softening point of 850° C. or lower, a process for producing a silica glass member, and a process for bonding a ceramic and a silica glass.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.