High-load vacuum chamber motion feedthrough systems and methods
US10919014B2 · kind B2 · utility
2Cited by
6References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 8, 2019 |
| Grant date | Feb 16, 2021 |
| Priority date | — |
| Expiry date | May 13, 2039 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01J3/03
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A feedthrough for use in a vacuum chamber including a hollow tube, a first O-ring, and rod, and a vacuum fitting. The hollow tube having a first recess located along an entirety of an inner circumference. The first O-ring captured by the first recess. The rod carried by the hollow tube wherein an outer circumference of the rod is configured to contact an entirety of an inner circumference of the first O-ring. The vacuum fitting fixedly secured to the hollow tube.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.