System for loading and unloading a substrate, method for loading a substrate, and method for unloading a substrate
US10919713B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Oct 10, 2017 |
| Grant date | Feb 16, 2021 |
| Priority date | — |
| Expiry date | Nov 23, 2038 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB65G2249/04
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
The disclosed system for loading and unloading the substrate includes: a substrate rotation apparatus having a first rotation position and a second rotation position with a difference in rotation angle of 90 degrees, wherein the substrate rotation apparatus includes two layers of sucker assemblies, each of which includes a plate body, a plurality of support suction tubes arranged on the plate body, and first suckers connected with tops of respective support suction tubes respectively, and there are gaps, for inserting the substrate therein, between respective first suckers of a lower layer of sucker assembly, and a plate body of an upper layer of sucker assembly; and a mechanical hand including a plurality of mechanical fingers capable of holding two halves of the substrate, both of which are arranged in a length direction of the mechanical fingers, and joined together into an entire substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.