Fabrication of high aspect ratio tall free standing posts using carbon-nanotube (CNT) templated microfabrication
US10921279B2 · kind B2 · utility
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20Claims
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Key dates
| Filing date | Oct 20, 2016 |
| Grant date | Feb 16, 2021 |
| Priority date | — |
| Expiry date | Jan 4, 2038 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/92
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In a general aspect, an apparatus can include a substrate and a post disposed on the substrate. The post can include a plurality of nanotubes and extend substantially vertically from the substrate. The post can have an aspect ratio of a height of the post to a diameter of the post of greater than or equal to 25:1.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.