Patent · US Active

Charged particle beam device and method of operating a charged particle beam device

US10923313B1 · kind B1 · utility

0Cited by

0References

22Claims

0Family size

Assignee

ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH · DE

Inventor

Benjamin John Cook · Munich, DE

Key dates

Filing date	Oct 17, 2019
Grant date	Feb 16, 2021
Priority date	—
Expiry date	Oct 17, 2039

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/2817
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

The charged particle beam device includes a charged particle source and a beamlet-forming multiaperture plate. The device also includes a precompensator for reducing aberrations of the beamlets at a target, a scanner for scanning each of the beamlets, an objective lens for focusing each beamlet onto the target, and a controller configured to synchronize the precompensator and the scanner. The precompensator includes: at least one “radially variable” multiaperture electrode in which the diameter of each aperture thereof scales with the distance of the aperture from the optical axis, z; and at least one “cartesianally variable” multiaperture electrode in which the diameter of each aperture thereof scales with an x component of the position of the aperture.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.