Rapid multiplexed infrared 3D nano-tomography
US10928311B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 12, 2019 |
| Grant date | Feb 23, 2021 |
| Priority date | — |
| Expiry date | Apr 29, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/12
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and system for rapid, label free nanoscale chemical imaging and tomography (3D) with multiplexing for speed, and engineered coherent illumination and detection to achieve 3-D resolution at twice the Abbe limit. A sample undergoes photo-thermal heating using a modulated infrared light source and the resulting probe beam modulation is measured with one or more visible laser probes. Varying the infrared wavelength results in a spectrum which characterizes the chemical composition of the sample. Optionally, inelastically scattered light generated as a result of the probe beam interacting with the sample is collected simultaneously to yield additional chemical information.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.