Patent · US Active

Rapid multiplexed infrared 3D nano-tomography

US10928311B2 · kind B2 · utility

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10References
19Claims
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Assignee

Inventors

Key dates

Filing dateApr 12, 2019
Grant dateFeb 23, 2021
Priority date
Expiry dateApr 29, 2039

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01N2201/12
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A method and system for rapid, label free nanoscale chemical imaging and tomography (3D) with multiplexing for speed, and engineered coherent illumination and detection to achieve 3-D resolution at twice the Abbe limit. A sample undergoes photo-thermal heating using a modulated infrared light source and the resulting probe beam modulation is measured with one or more visible laser probes. Varying the infrared wavelength results in a spectrum which characterizes the chemical composition of the sample. Optionally, inelastically scattered light generated as a result of the probe beam interacting with the sample is collected simultaneously to yield additional chemical information.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.