Patent · US Active

Shutter device

US10928704B2 · kind B2 · utility

0Cited by

2References

9Claims

0Family size

Assignee

SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD · CN

Inventors

Yanfei Wang · Lo Wu, CN
Fuping Zhang · Shanghai, CN
Xiang Jia · Shanghai, CN

Key dates

Filing date	Aug 9, 2017
Grant date	Feb 23, 2021
Priority date	—
Expiry date	Aug 9, 2037

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/7055
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A shutter device includes a movable shading module and a movement control module configured to control movement of the movable shading module. The movable shading module includes a shading unit, a driving unit and a signal measuring unit. The shading unit includes two blades, and the movement control module is configured to generate a control signal. The driving unit is configured to receive the control signal and drive the two blades. The signal measuring unit is configured to measure an operating status of the blades feed it back to the movement control module in real time. The movement control module is configured to update the control signal based on the fed back operating status. This shutter device can overcome the problems of low exposure dose accuracy and light leaks arising from the use of existing shutters and provide various accurately-controlled exposure doses suitable for different applications.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.