Mass spectrometer, sampling probe, and analysis method
US10930488B2 · kind B2 · utility
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11Claims
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Key dates
| Filing date | Mar 10, 2020 |
| Grant date | Feb 23, 2021 |
| Priority date | — |
| Expiry date | Mar 10, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J49/14
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A mass spectrometer, includes: a sampling probe that irradiates a specimen disposed in the atmosphere with an electron and obtains a sample separated from the specimen; and a measurement unit that performs mass spectrometry of the sample obtained by the sampling probe, wherein the sampling probe comprises: a casing having an opening which is opened to the atmosphere and an outlet through which the sample is discharged to the measurement unit; and a surface emission type electron emission element housed in the casing such that an electron emission surface thereof opposes to the opening.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.