Method of producing silicon elements and integrated circuits
US10930513B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 21, 2019 |
| Grant date | Feb 23, 2021 |
| Priority date | — |
| Expiry date | Oct 21, 2039 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24B9/065
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
In a method of manufacturing silicon elements a part having a cross section with four straight sides and four arcuate portions each connecting two of the straight skies with one another and a rotatable abrasive tool which has a circular abrasive working layer composed of abrasive particles are provided, the tool is rotated around a central axis of the part having a cross section with the four straight sides and the four arcuate portions each connecting two of the straight sides with one another, in contact with the four arcuate portions with simultaneous displacement of the tool along an axis of the part to remove outer layers of the outer portions and to finely machine underlying arcuate surfaces of the part, and the part is cut transversely to produce silicone elements.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.