Sample inspection utilizing time modulated illumination
US10931881B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 19, 2019 |
| Grant date | Feb 23, 2021 |
| Priority date | — |
| Expiry date | Sep 19, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04N23/74
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A system and corresponding method are presented. The system includes an illumination unit including at least one light source configured for emitting coherent illumination of one or more selected wavelength ranges having selected illumination modulation pattern and for directing the coherent illumination onto one or more selected inspection regions; and a collection unit including at least one detector array and imaging optical arrangement configured for collecting interacting light from the one or more selected inspection regions and for generating corresponding one or more sequences of image data pieces at selected sampling rate. The image data pieces are indicative of secondary speckle patterns formed in collected interacting light. The illumination modulation pattern is selected for increasing temporal bandwidth collection of speckle patterns associated with temporal shifts in the one or more inspection regions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.