Patent · US Active

System of non-acoustic sensor combined with MEMS microphone

US10934160B2 · kind B2 · utility

0Cited by
1References
13Claims
0Family size

Assignee

Inventors

Key dates

Filing dateNov 17, 2017
Grant dateMar 2, 2021
Priority date
Expiry dateNov 17, 2037

Classification

  • Technology area (CPC B)Performing Operations; Transporting
  • CPC primaryB81B2201/0264
  • WIPO fieldAudio-visual technology
  • WIPO sectorElectrical engineering

Abstract

A system includes a pressure sensor combined with a MEMS microphone. The pressure sensor and the MEMS microphone arranged side by side are formed on a same substrate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.