System of non-acoustic sensor combined with MEMS microphone
US10934160B2 · kind B2 · utility
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1References
13Claims
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Key dates
| Filing date | Nov 17, 2017 |
| Grant date | Mar 2, 2021 |
| Priority date | — |
| Expiry date | Nov 17, 2037 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2201/0264
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A system includes a pressure sensor combined with a MEMS microphone. The pressure sensor and the MEMS microphone arranged side by side are formed on a same substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.