Optical module for spectral analysis
US10935426B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 28, 2019 |
| Grant date | Mar 2, 2021 |
| Priority date | — |
| Expiry date | Jun 28, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optical module includes: a mirror unit having a movable mirror and a fixed mirror; a beam splitter unit; a light incident unit that causes measurement light to be incident to the beam splitter unit; a first light detector that detects interference light of the measurement light; a second light source that emits laser light; a second light detector that detects interference light of the laser light; a first mirror that allows the measurement light to be transmitted therethrough and reflects the laser light; a second mirror that reflects a part of the laser light and allows the remainder of the laser light to be transmitted therethrough; a third mirror that reflects the laser light; and a return light suppressing unit that suppresses the laser light from becoming return light, and is disposed on a side opposite to the second optical device with respect to the second mirror.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.