Micro device transferring apparatus and micro device transferring method
US10937559B2 · kind B2 · utility
1Cited by
0References
10Claims
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Assignee
Inventors
Key dates
| Filing date | Aug 28, 2019 |
| Grant date | Mar 2, 2021 |
| Priority date | — |
| Expiry date | Aug 28, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L24/97
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A micro device transferring apparatus and a micro device transferring method are provided. The micro device transferring apparatus for moving a micro device fixed on an original substrate to a target substrate includes: a stripper on a side of the original substrate away from the micro device, configured to strip the micro device off the original substrate, and an optical tweezer configured to tweeze the micro device from a side of the original substrate provided with the micro device, wherein an accommodating space for accommodating the micro device and the original substrate is between the stripper and the optical tweezer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.