Exposure machine and method of transferring a substrate of same
US10941011B2 · kind B2 · utility
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0References
9Claims
0Family size
Inventor
Key dates
| Filing date | Apr 15, 2019 |
| Grant date | Mar 9, 2021 |
| Priority date | — |
| Expiry date | Apr 15, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67754
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
An exposure machine includes a base portion, a port portion, and a conveying structure. The base portion includes a work table and a bearing frame. The bearing frame is disposed on the work table and is configured to carry a tray. The port portion is configured to serve as a feed port and a discharge port of the exposure machine. The conveying structure includes at least one upper arm, at least one lower arm, and a movable tray guide. The movable tray guide is connected to the base portion and the port portion. The at least one lower arm is provided with a hook configured to hook the tray and move the tray to the port portion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.