Patent · US Active

Method and apparatus for enhanced photo-thermal imaging and spectroscopy

US10942116B2 · kind B2 · utility

23Cited by
21References
46Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 9, 2018
Grant dateMar 9, 2021
Priority date
Expiry dateOct 9, 2038

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01J49/26
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

System for performing chemical spectroscopy on samples from the scale of nanometers to millimeters or more with a multifunctional platform combining analytical and imaging techniques including dual beam photo-thermal spectroscopy with confocal microscopy, Raman spectroscopy, fluorescence detection, various vacuum analytical techniques and/or mass spectrometry. In embodiments described herein, the light beams of a dual-beam system are used for heating and sensing.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.