Method and apparatus for enhanced photo-thermal imaging and spectroscopy
US10942116B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 9, 2018 |
| Grant date | Mar 9, 2021 |
| Priority date | — |
| Expiry date | Oct 9, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J49/26
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
System for performing chemical spectroscopy on samples from the scale of nanometers to millimeters or more with a multifunctional platform combining analytical and imaging techniques including dual beam photo-thermal spectroscopy with confocal microscopy, Raman spectroscopy, fluorescence detection, various vacuum analytical techniques and/or mass spectrometry. In embodiments described herein, the light beams of a dual-beam system are used for heating and sensing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.