Device of light source with diode array emitting high-uniformity ultraviolet
US10942456B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 17, 2020 |
| Grant date | Mar 9, 2021 |
| Priority date | — |
| Expiry date | Jan 17, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/7035
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An ultraviolet (UV) light source is provided. The device uses a high-uniformity diode array. A lens unit of collimated illumination lenses is used. A light source of UV light-emitting diode (UVLED) array is formed and passes through the lens unit to uniformly distribute the light source and obtain a collimated light. The present invention comprises a light source of UVLED array; a collimated illumination lens unit; and a substrate. The construction is simple. The present invention can be applied in the lithography of a semiconductor. The lithography forms contact lines of widths not greater than 3 microns (μm); soft-contact lines of widths of 3˜30 μm; and short-spaced lines of widths of 30˜200 μm. The present invention avoids the mask from contact wear-out for multiple uses, and further reduces the replacement rate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.