Process for manufacturing a pixel of an OLED micro-display

US10944077B2 · kind B2 · utility

Assignee

• COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

• Laurent Mollard · Grenoble, FR
• Tony Maindron · Grenoble, FR
• Myriam TOURNAIRE · Grenoble, FR

Key dates

• Filing date: Dec 12, 2019
• Grant date: Mar 9, 2021
• Expiry date: Dec 12, 2039

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y02P70/50

Abstract

A process includes the following successive steps: a) providing a substrate including a structured first electrode; b) forming in succession first and second bilayer stacks on the structured first electrode, each bilayer stack including in succession first and second layers made of first and second materials that are transparent conductive oxides able to be selectively etched; c) etching the second bilayer stack in a zone intended to accommodate a blue subpixel and in a zone intended to accommodate a green subpixel; d) etching the first bilayer stack in the zone intended to accommodate the blue subpixel; e) forming a stack of organic light-emitting layers, the stack being configured to emit white light; f) forming a second electrode on the stack of organic light-emitting layers so as to obtain an optical resonator with the first electrode.