Processing arrangement and method for conditioning a processing arrangement

US10947619B2 · kind B2 · utility

Assignee

• VON ARDENNE Asset GmbH & Co KG · DE

Inventors

• Sven Heinrich · Dresden, DE
• Michael D. Brandt · Suamico, US
• Daniel Stange · Dresden, DE
• Damir Muchamedjarow · Rippien, DE

Key dates

• Filing date: Jul 5, 2018
• Grant date: Mar 16, 2021
• Expiry date: Nov 4, 2038

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C23C16/45591
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

A processing arrangement comprising: a process chamber comprising an upper chamber wall, a lower chamber wall and two lateral chamber walls; an insulating structure, arranged between the processing region and each of the upper chamber wall, the lower chamber wall and the two lateral chamber walls, respectively, for thermally insulating the processing region, wherein the insulating structure is configured as gas-permeable at least in sections in such a way that a process gas from the processing region can flow out of the processing region in the direction in each of the upper chamber wall, the lower chamber wall and the two lateral chamber walls, respectively, through the insulating structure; and a gas channel, arranged between the insulating structure and each of the upper chamber wall, the lower chamber wall and the two lateral chamber walls, respectively, for pumping away the process gas which flows through the insulating structure.