Apparatus and device for applying voltage to substrate
US10948748B2 · kind B2 · utility
Assignees
Inventor
Key dates
| Filing date | Jan 22, 2018 |
| Grant date | Mar 16, 2021 |
| Priority date | — |
| Expiry date | Jan 27, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/133788
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
This application relates to an apparatus and a device for applying a voltage to a substrate. The apparatus for applying a voltage to a substrate includes: a plurality of movable voltage-application fixtures, including: a voltage-application unit, configured to electrically come into contact with a substrate, where a bottom of a base includes a linkage joining portion; and a transmission unit, including: a linkage structure, a rail structure, and a driving component, where the driving component may output power to drive the linkage structure, the linkage structure may perform a relative motion on the rail structure, and the linkage structure may be combined with the linkage joining portion, and drive, by means of a power output of the driving component, the voltage-application unit to move, so that the voltage-application probes move to a particular position to apply a voltage to the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.