Elastic wave device
US10951193B2 · kind B2 · utility
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19Claims
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Key dates
| Filing date | Jan 25, 2018 |
| Grant date | Mar 16, 2021 |
| Priority date | — |
| Expiry date | Mar 30, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2003/025
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
An elastic wave device includes an interdigital transducer electrode including electrode fingers provided on a first principal surface of a piezoelectric thin film. A conductive layer is provided on a second principal surface of the piezoelectric thin film. An elastic wave propagates in the piezoelectric thin film in an S0 mode of a plate wave, and a piezoelectric thin film portion in a region below spaces between the electrode fingers of the interdigital transducer electrode is displaced by a greater amount than each electrode finger and a piezoelectric thin film portion in a region below each electrode finger.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.