Patent · US Active

Autofocus with an angle-variable illumination

US10955653B2 · kind B2 · utility

1Cited by

2References

22Claims

0Family size

Assignee

Cad Zeiss Microscopy GmbH · DE

Inventors

Lars Stoppe · Jena, DE
Thomas Ohrt · Golmsdorf, DE
Christian Dietrich · Jena, DE
Markus Sticker · Jena, DE

Key dates

Filing date	Mar 28, 2019
Grant date	Mar 23, 2021
Priority date	—
Expiry date	Sep 18, 2039

Classification

Technology area (CPC G)Physics
CPC primaryG01N2201/068
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Various aspects of the invention relate to techniques to facilitate autofocus techniques for a test object by means of an angle-variable illumination. Here, image datasets are captured at a multiplicity of angle-variable illumination geometries. The captured image datsets are evaluated in order to determine the Z-position.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.