Piezoelectric devices with obliquely aligned electrodes
US10957843B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Aug 10, 2017 |
| Grant date | Mar 23, 2021 |
| Priority date | — |
| Expiry date | Aug 10, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/87
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
Single bulk unimorph piezoelectric elements, with interdigitated electrodes aligned obliquely relative to the direction perpendicular to the axis of the element, such that a torsional response is induced into the element. When such elements are used as a beam structure, with angularly oriented electrodes on both opposite surfaces of the beam, and with their orientations at mutually opposite angles, motion ranging from pure torsional rotation to pure bending can be obtained, depending on the comparative level and polarity of the voltages applied to each of the two electrode sets. If such elements are used as the spiral support arms of a central platform, a large displacement of the stage can be achieved. Due to the oblique orientation of the IDE's, the piezoelectric transduction induces torsional deformation in the spirals, and this torsion is converted by the spiral arms to a parallel out-of-plane platform motion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.