Transfer apparatus using electrostatic attraction and transfer method using electrostatic attraction
US10957934B2 · kind B2 · utility
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8Claims
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Inventor
Key dates
| Filing date | Jan 25, 2019 |
| Grant date | Mar 23, 2021 |
| Priority date | — |
| Expiry date | Nov 10, 2039 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02E60/50
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A transfer apparatus using an electrostatic attraction includes an electrostatic chuck for attracting and placing a workpiece as a transfer member on a placement surface by electrostatic attraction. The electrostatic chuck is grounded by an earth via a ground electrode after the electrostatic chuck receives electric power from a power supply surface of a power source via power receiving electrodes of the electrostatic chuck, so that the electrostatic chuck is configured to attract and place the workpiece on the placement surface by electrostatic attraction in a state where electrostatic balance is broken.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.