Patent · US Active

Detecting a substrate

US10962362B2 · kind B2 · utility

0Cited by
10References
11Claims
0Family size

Assignee

Inventors

Key dates

Filing dateAug 30, 2018
Grant dateMar 30, 2021
Priority date—
Expiry dateJun 11, 2039

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01N2035/0493
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

This disclosure is directed to a system and method for detecting a surface of a substrate within a scanner.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.