Patent · US Active

Microsystem device comprising integrated desiccant monitoring

US10962469B2 · kind B2 · utility

1Cited by

1References

9Claims

0Family size

Assignee

Albert-Ludwigs-Universitaet Freiburg · DE

Inventors

Linda Rudmann · Glückstadt, DE
Michael Langenmair · Glückstadt, DE
Juan Sebastian Ordonez · Glückstadt, DE
Thomas Stieglitz · Freiburg (Elbe), DE

Key dates

Filing date	Sep 8, 2017
Grant date	Mar 30, 2021
Priority date	—
Expiry date	Oct 1, 2037

Classification

Technology area (CPC H)Electricity
CPC primaryH05K5/069
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A miniaturized microsystem device including at least one of electrical, optical and mechanical components in a hermetically or non-hermetically sealed housing with respect to air humidity or encapsulated, which contains a desiccant. The humidity-dependent lifetime of the arrangement is determined by measuring the absorptivity of the desiccant.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.