Large motion latching microelectromechanical displacement structures
US10962765B1 · kind B1 · utility
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15Claims
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Key dates
| Filing date | Mar 27, 2019 |
| Grant date | Mar 30, 2021 |
| Priority date | — |
| Expiry date | Dec 18, 2039 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2207/07
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A planer silicon-based displacement amplification structure and a method are provided for latching the displacement. The displacement amplification structure may include a first actuation beam and a second actuation beam coupled to the first beam with an angle, the ends of the first beam and the second beam coupled to fixture sites, and an end of the second beam coupled to a motion actuator; a motion shutter coupled to an opposing end of the first and second beams; and a latching thermoelectric displacement structure blocking the shutter return path and have faster response than the shutter structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.