Patent · US Active

Adhesive bonded micro electro mechanical system

US10962766B2 · kind B2 · utility

0Cited by
8References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 3, 2019
Grant dateMar 30, 2021
Priority date
Expiry dateOct 11, 2039

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02B2027/0187
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A micro electro mechanical system is provided. The micro electro mechanical system includes a first part bonded to a second part by a structural adhesive interface. The structural adhesive interface includes a conductive structural adhesive portion, and a non-conductive structural adhesive portion at least partially surrounding the conductive structural adhesive portion. The conductive structural adhesive portion and the non-conductive structural adhesive portion have a thixotropy index greater than one.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.