Fabrication of multi-level graded photonic super-crystals
US10964916B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 11, 2019 |
| Grant date | Mar 30, 2021 |
| Priority date | — |
| Expiry date | Jul 11, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K2101/80
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Direct pixel-by-pixel phase engineering in a SLM is an effective method for the holographic fabrication of graded photonic super-quasi-crystals with desired disorder and graded photonic super-crystals with rectangular unit-cells. Multiple levels of filling fractions of dielectric in the crystal have been created in the graded regions. Fabrication of these graded photonic super-crystals and super-quasi-crystals with small feature size is possible, using a laser projection system consisting of integrated spatial light modulator and reflective optical element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.