Acoustic resonator and method for fabricating the same
US10965271B2 · kind B2 · utility
0Cited by
2References
8Claims
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Key dates
| Filing date | Jan 19, 2018 |
| Grant date | Mar 30, 2021 |
| Priority date | — |
| Expiry date | Jul 5, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2003/023
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
An acoustic resonator includes a membrane layer disposed on an insulating layer; a cavity formed by the insulating layer and the membrane layer; a resonating portion disposed on the cavity and having a first electrode, a piezoelectric layer, and a second electrode stacked thereon; a protective layer disposed on the resonating portion; and a hydrophobic layer formed on the protective layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.