Microelectronic sensor device with an out-of-plane detection having a controlled cross sensitivity
US10968096B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 1, 2019 |
| Grant date | Apr 6, 2021 |
| Priority date | — |
| Expiry date | Oct 1, 2039 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2203/056
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
Microelectromechanical sensor with an out-of-plane detection has a cross sensitivity in a first direction in the plane with a value of ST, the sensor comprising a support, a mass suspended from the support by beams stressed by bending, in such a way that the inertial mass is capable of moving with respect to the support about an axis of rotation contained in a plane of the sensor, a stress gauge suspended between the mass and the support. The bending beams have a dimension tf in the out-of-plane direction and the mass has a dimension tM in the out-of-plane direction such that Larm is the distance between the centre of gravity of the mass and the centre of the bending beams projected onto the first direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.