Imaging devices having piezoelectric transceivers
US10969270B2 · kind B2 · utility
8Cited by
22References
26Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 27, 2020 |
| Grant date | Apr 6, 2021 |
| Priority date | — |
| Expiry date | Mar 27, 2040 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B3/0021
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A micromachined ultrasonic transducer (MUT). The MUT includes: a substrate; a membrane suspending from the substrate; a bottom electrode disposed on the membrane; a piezoelectric layer disposed on the bottom electrode and an asymmetric top electrode is disposed on the piezoelectric layer. The areal density distribution of the asymmetric electrode along an axis has a plurality of local maxima, wherein locations of the plurality of local maxima coincide with locations where a plurality of anti-nodal points at a vibrational resonance frequency is located.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.