Active gas generating apparatus
US10971338B2 · kind B2 · utility
3Cited by
4References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 6, 2017 |
| Grant date | Apr 6, 2021 |
| Priority date | — |
| Expiry date | Sep 6, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/332
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
In an active gas generating apparatus, a power feeder is provided above metal electrodes in an integrated high-voltage electrode unit. When seen in plan view, the power feeder has a shape that entirely covers the metal electrodes in the integrated high-voltage electrode unit. Each of power feeding units is provided below the metal electrodes in an integrated ground electrode unit. When seen in plan view, each of the power feeding units has a shape that entirely covers the metal electrodes of the integrated ground electrode unit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.