Optical interferometer with reference arm longer than sample arm
US10976151B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 26, 2018 |
| Grant date | Apr 13, 2021 |
| Priority date | — |
| Expiry date | Apr 30, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J3/4532
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optical interferometer includes a beam splitter module and an optical sensor. The beam splitter module includes a lens assembly and a splitter cube. A light incident surface of the splitter cube is substantially orthogonal to an optical axis of the lens assembly. An acute angle is between the light incident surface and a light splitting surface of the splitter cube. A sampling surface of the splitter cube is substantially parallel to the light incident surface. A light reflecting surface of the splitter cube is substantially orthogonal to the light incident surface. The light incident surface is closer to the lens assembly than the sampling surface. A reference arm is defined between a splitter position on the light splitting surface and the light reflecting surface, a sample arm is defined between the splitter position and the sampling surface, and the reference arm is longer than the sample arm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.