Leak inspection assistance device and leak inspection method using same
US10976212B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Oct 3, 2017 |
| Grant date | Apr 13, 2021 |
| Priority date | — |
| Expiry date | Feb 28, 2038 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01D2273/18
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
Provided are a leak inspection assistance device and a leak inspection method using the same which enable using a normal leak inspection device in a leak inspection of filters in a clean room, have a small cost burden since a scanning robot, large-scape equipment, an incidental work, and the like are not required, and enable performing the accurate leak inspection with a small number of workers.A projection device which projects a suction point of a suction probe adjunct to a leak inspection device which performs a leak inspection onto a surface of a filter in a clean room in such a manner that the suction point moves in X-Y axis directions orthogonal to each other along the surface of the filter at a fixed interval and a fixed speed is provided, and a worker uses the suction probe for scanning in accordance with movement of the suction point.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.