Patent · US Active

Heterogeneous integration of curved mirror structure for passive alignment in chip-scale lidar

US10976414B2 · kind B2 · utility

4Cited by
36References
19Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 26, 2018
Grant dateApr 13, 2021
Priority date
Expiry dateAug 21, 2039

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2223/54486
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A chip-scale coherent lidar system includes a photonic chip that includes a light source, a transmit beam coupler to provide an output signal, and a receive beam coupler to receive a received signal based on a reflection of the output signal by a target. The system also includes a transmit beam steering device to transmit the output signal out of the system, and a receive beam steering device to obtain the received signal into the system. A transmit beam curved mirror reflects the output signal from the transmit beam coupler to the transmit beam steering device. A receive beam curved mirror reflects the received signal from the receive beam steering device to the receive beam coupler. The transmit beam curved mirror and the receive beam curved mirror are formed in a substrate that is heterogeneously integrated with the photonic chip.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.