Patent · US Active

Tubular target having a protective device

US10978279B2 · kind B2 · utility

0Cited by

7References

8Claims

0Family size

Assignee

Plansee SE · AT

Inventors

Christian Linke · Celle, DE
Manfred Sulik · Reutte, AT
Martin Kathrein · Reutte, AT

Key dates

Filing date	Apr 5, 2012
Grant date	Apr 13, 2021
Priority date	—
Expiry date	Mar 21, 2033

Classification

Technology area (CPC H)Electricity
CPC primaryH01J37/3497
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A tubular target for cathode atomization does not have a backing tube and it is made of molybdenum or a molybdenum alloy. The target has an inner surface which is in contact at least in certain regions with a cooling medium, wherein at least one region of the inner surface is separated from the cooling medium by at least one protective device. By way of example, the protective device may be in the form of a polymer layer. The tubular target exhibits outstanding long-term stability.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.