MEMS transducer system for pressure and acoustic sensing

US10981777B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Andrew J. Doller · Shaler Township, US
• Gokhan Hatipoglu · Pittsburgh, US
• Yujie Zhang · Lomita, US
• Bernhard Gehl · Wannweil, DE
• Daniel Christoph Meisel · Pittsburgh, US

Key dates

• Filing date: Nov 27, 2017
• Grant date: Apr 20, 2021
• Expiry date: Feb 13, 2038

Classification

• Technology area (CPC H): Electricity
• CPC primary: H04R7/10
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

A MEMS transducer system includes a MEMS transducer device for sensing at least one of pressure signal or acoustic signal. The MEMS transducer device includes first and second diaphragms. Formed between the diaphragms are a spacer, plate capacitor elements, and electrode elements. The plate capacitor elements are coupled to the diaphragms via the spacer. An optional member may be disposed within the spacer. The distal ends of the electrode elements are coupled to a structure such as insulator element. An optional oxides may be formed within the plate capacitor elements. Pressure sensing electrode formed between the diaphragms may be coupled to the insulator element.