Mask plate assembly capable of preventing wrinkle and assembly method thereof
US10982314B2 · kind B2 · utility
14Cited by
8References
15Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Feb 24, 2017 |
| Grant date | Apr 20, 2021 |
| Priority date | — |
| Expiry date | Feb 24, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K71/166
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Disclosed are a mask plate and an assembly method thereof. The mask plate includes a covering bar; a support bar; and at least one mask sheet, the mask sheet includes one mask area, a mask pattern is distributed in the entire mask area; and the covering bar and the support bar are intersected with each other to divide the mask area into a plurality of mask units. Thus, the mask sheet will not produce wrinkle in different degrees upon being stretched, in this way, the accuracy of the deposited or evaporated pattern can be improved, and the yield of the mask plate can be improved as well.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.