Mask plate for evaporation
US10982315B2 · kind B2 · utility
2Cited by
2References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 13, 2017 |
| Grant date | Apr 20, 2021 |
| Priority date | — |
| Expiry date | Mar 17, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K71/166
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A mask plate, a manufacturing method of the mask plate, and a method of evaporation by using the mask plate are provided. The mask plate includes an opening plate, the opening plate includes an opening and a blocking portion outside the opening, a concavity is in the blocking portion, and a depth of the concavity is smaller than a thickness of the blocking portion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.