Patent · US Active

Device and method for producing defined properties of gradient layers in a system of multilayered coatings in sputtering installations

US10982320B2 · kind B2 · utility

0Cited by

1References

14Claims

0Family size

Assignee

GRENZEBACH MASCHINENBAU GMBH · DE

Inventors

Joerg Fiukowski · Torgau, DE
Gerd Kleideiter · Ahaus, DE

Key dates

Filing date	Oct 18, 2017
Grant date	Apr 20, 2021
Priority date	—
Expiry date	Oct 18, 2037

Classification

Technology area (CPC H)Electricity
CPC primaryH01J37/3467
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

Device and method for producing defined properties of gradient layers in a system of multilayered coatings in sputtering installations with the following features: a) a pair of cathodes arranged in a common process chamber and consisting of a first cathode body and a second cathode body is supplied with direct current by means of a common power supply, wherein, before entering the process chamber, the direct current is converted into a series of pulses comprising alternating positive and negative pulses with interpulse periods in between, b) an arrangement for controlling the length of the individual pulses and the duration of the respective interpulse periods.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.