System and method of surface inspection of an object using mulitplexed optical coherence tomography
US10982947B2 · kind B2 · utility
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7Claims
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Key dates
| Filing date | Jun 12, 2018 |
| Grant date | Apr 20, 2021 |
| Priority date | — |
| Expiry date | Jun 12, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/2441
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system and method for surface inspection of an object using multiplexed optical coherence tomography (OCT) is provided. The method includes moving the object relative to two or more scanner heads along a direction of travel; alternatingly directing a sample beam to each of the two or more scanner heads; and when the sample beam is directed at each respective scanner head, scanning comprising: steering the sample beam from the respective scanner head to an unscanned region on the surface of the object; and performing an A-scan of the object.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.