High flow tubular bypass
US10982985B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 3, 2020 |
| Grant date | Apr 20, 2021 |
| Priority date | — |
| Expiry date | Feb 3, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F15/005
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Mass flow meters and mass flow controllers that include mass flow meters are disclosed. A mass flow meter includes a main flow path for a gas, and a bypass with a length, L, within the main flow path. The bypass includes a continuous flow section including a plurality of continuous capillary tubes that each have a length, L. The bypass also includes n flow segments forming n−1 spaces within the bypass where n is greater than or equal to 2, and each of the flow segments has a plurality of capillary tubes. The mass flow meter also includes at least one thermal sensor including a sensor tube, and the sensor tube is positioned across at least one of the flow segments to divert a portion of the gas around the at least one of the flow segments and provide a measured flow signal in response to the diverted portion of the gas.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.