Radiation sensor with anti-glare protection
US10982997B2 · kind B2 · utility
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2References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 14, 2018 |
| Grant date | Apr 20, 2021 |
| Priority date | — |
| Expiry date | May 9, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10F39/193
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A radiation sensor including a plurality of pixels formed in and on a semiconductor substrate, each pixel including a microboard suspended above the substrate by thermal insulation arms, the microboard including: a conversion element for converting incident electromagnetic radiation into thermal energy; and a passive optical shutter including a heat-sensitive layer covering one of the faces of the conversion element, the heat-sensitive layer having a reflection coefficient for the radiation to be detected that increases as a function of its temperature.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.